References

  1. Stillwagon, L. E. and Larson, R. G., "Topographic substrate leveling during spin coating," Proceedings - Electrochemical Society, 90-1(Proc. Symp. Patterning Sci. Technol., 1989), 230-8 (1990).
  2. Stillwagon, L. E. and Larson, R. G., "Fundamentals of topographic substrate leveling," Journal of Applied Physics, 63(11), 5251-8 (1988).