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SFIL Publications

Copyrights of the following articles belong to the respective journals or authors. These articles may be downloaded for personal use only. Any other use requires prior permission of the authors and the publishers. Please visit the publishers' online websites.

2003

2002

2001

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1999

Related Publications

  • D.P. Mancini, D.J. Resnick, K.A. Gehoski, L.L. Popovich and D.Y. Chang. "Low surface energy polymeric release coating for improved contact print lithography." Proc. SPIE: 21st Annual BACUS Symposium on Photomask Technology 4562: 593-599 (2001).

  • C.J. Martin, R.L. Engelstad, E.G. Lovell, D.J. Resnick and E.J. Weisbrod. "Prediction of fabrication distortions in step and flash imprint lithography templates." J. Vac. Sci. Tech. B 20(6): 2891-2895 (2002).

 



2003 Willson Research GroupUniversity of Texas at Austin
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