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Library -- 1990 - 1999
1994-1995
90-91 92-93 96-97
98-99
- MacDonald, Scott A.; Willson, C.
Grant; Fréchet, Jean M. J., "Chemical Amplification in
High-Resolution Imaging Systems," Accounts of Chemical
Research, 27(6), 151-158 (1994).
- Lee, S. Ming; Fréchet, Jean M. J.;
Willson, C. Grant. "Photocrosslinking
of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution:
Use of Polyfunctional Benzylic Alcohols in the Design of
Chemically Amplified Resist Materials with Tunable
Sensitivities," Macromolecules, 27, 5154 (1994).
- Renaldo, Alfred F., Lauchlan, Laurie
J., Hofer, Donald C., Hinsberg, William D., McKean, Dennis R.,
Santini, Hugo A., and Willson, C. Grant, "Lithographic
performance of a positive photoresist for thick-film
applications," Advances in Resist Technology and Processing
XII, Proc.SPIE, 2438, 853-866 (1995).
- Tsiartas, Pavlos C.; Simpson, Logan
L.; Qin, Anwei; Willson, C. Grant; Krukonis, Val J.;
Gallagher-Wetmore, P. M. "Effect
of Molecular Weight Distribution on the Dissolution Properties of
Novolac Blends," Advances in Resist Technology and
Processing XII, Proc.SPIE, 2438, 261-271 (1995).
- Tsiartas, P. C.; Simpson, L. L.;
Willson, C. G.; Allen, R. D.; Krukonis, V. J. Gallagher-Wetmore, P.
M. "Molecular
weight, ionic strength and temperature effects on the dissolution
rate of low molecular weight Novolac fractions,"
Proc.PMSE, 72, 209 (1995).
- Ahn, Kwang-Duk and Willson, C. Grant,
"Synthesis of Polymers Having N-Hydroxymaleimide Units by
Thermolysis of N-(Isopropyloxycarbonyloxy)maleimide Polymers," Bull.Korean
Chem.Soc., 16(5), 443-449 (1995).
- Leung, Man-kit; Fréchet, Jean M. J.;
Cameron, James F.; Willson, C. Grant.
"Design and Synthesis of Photoactive Polymer Systems
Base on Amine-Catalyzed Intramolecular Imidization of Polymer Side
Chains," Macromolecules, 28(13), 4693-4700
(1995).
- Ahn, Kwang-Duk; Koo, Deok-II;
Willson, C. Grant. "Synthesis
and polymerization of t-BOC protected maleimide monomers: N-(t-butyloxycarbonyloxy)maleimide
and N-[p-(t-butyloxycarbonyloxy)phenyl]-maleimide,"
Polymer, 36(13), 2621-2628 (1995).
- Cameron, James F.; Willson, C. Grant;
Fréchet, Jean M. J. "New
Photolabile Amino Protecting Groups: Photogeneration of Amines from
[(3',5'-Dimethoxybenzoinyl)oxy]carbonyl Carbamates," J.Chem.Soc.,
Chem.Commun., 923-924
(1995).
- Willson, C. Grant and Herr, Daniel,
"Advances in photoresists will require coordinated university
research effort," Solid
State Technology, 200-199 (June 1995).
- Willson, C. G.; "Polymeric
photoimaging materials," Proc.PMSE,
73, 455 (1995).
- Brown, Smart; Ackmann, Paul; Wenner,
Val; Lowell, John; Ostrout, Wayne; Willson, C. Grant.
"Passive evaluation of surface and bulk ionic deposition
from resist removal using surface photovoltage," Proc.SEMI/IEEE
Advanced Semiconductor Manufacturing Conference and Workshop (ASMC),
316-321 (1995).
- McKean, Dennis R.; Russell, Thomas
P.; Hinsberg, William D.; Hofer, Don; Renaldo, Alfred E.; Willson,
C. Grant. "Thick
film positive photoresist. Development
and resolution enhancement technique," J.Vac.Sci.Technol.B, 13(6),
3000-3006 (1995).
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