Lecture Slides
- Lecture 1
- Lecture 2
- Lecture 3
- Lecture 4
- Lecture 5
- Lecture 6
- Lecture 7
- Lecture 8
- Lecture 9
- Lecture 10
- Lecture 11
- Lecture 12
- Lecture 13
- Lecture 14
- Lecture 15
- Lecture 16
- Lecture 17
- Lecture 18
- Lecture 19
- Lecture 20
- Lecture 21
- Lecture 22
- Lecture 23
- Lecture 24
- Graduate Student Presentations form
- 2018-09-27_Adam Ramm_Electron Beam Lithography
- 2018-10-04_Samuel Allen_Proximity Correction
- 2018-10-09_Morgan Williamson_Shot Noise in Lithography
- 2018-10-23 Kimberly Bourland - An Introduction to MEMS
- Samuel Johnson_Double Patterning
- Xin Yang_Antireflection Coating
- Thanh Tung Le_EUV Sources
- Dr. Stephen Sirard - Introduction to Plasma Etching
- Supplemental Slides for Island and Hole Test
- Exam I Key_2018
- Exam II Key_2018-11-20_Lecture
- Quiz Answers 2018
- Quiz Answers 2018 (Quiz 1 to 6) If you don't have Adobe Acrobat, you can get it here.