Motivations

Process Flow
Film Creation
Exposure
Post-Exposure Bake
Development

Collaborations

Support

Publications

Willson Research

·      University of Wisconsin, Department of Chemical Engineering
o       Professor Juan de Pablo and Tushar Jain

·      University of Texas at Austin, Department of Chemical Engineering
o       Professor Isaac Sanchez and Matthew Stone
o       Professor Venkat Ganesan
o       Professor Roger Bonnecaze

·      Intel Corporation
o       Vivek Singh

·      KLA-Tencor
o       Chris Mack, Mark Smith, and Jeff Byers

·      Texas Instruments
o       Lewis Flanagin

·      University of California Berkeley, Department of Electrical Engineering and Computer Sciences
o       Professor Andrew Neureuther

·      IBM TJ Watson Research Laboratory
o       Dario Goldfarb, Dave Medeiros, and Marie Angelopoulos

·      NIST
o       Eric Lin, Christopher Soles, Ronald Jones, Joseph Lenhart, Sushil Satija, Wen-li Wu

Last updated September 11, 2002
© 2002 Willson Research Group,
The University of Texas at Austin
Phone: 512.471.6364
Email: schmid@che.utexas.edu