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Transfer Layer The transfer layer is an organic film that can be tailored in thickness and properties for specific application, but must follow certain guidelines. The transfer layer can not be soluble in the liquid etch barrier, and must adhere well to the cured etch barrier. The transfer layer must remain intact after exposure. There should be at least modest etch selectivity between the etch barrier and the transfer layer in order to obtain aspect ratio magnification. These and other issues are being considered as materials development continues. We are currently using a commercial bottom anti-reflection coating as a transfer layer (DUV30J-11), Brewer Science), but have experimented with negative resists and other spun polymers as well.1,2
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