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Imprinting Resolution The resolution of imprinted features appears to be limited to the resolution of features written on the imprint template. Figure 1 shows cross-section SEMs of 50nm, 40 nm, and 30 nm line/space arrays demonstrating square feature profile.
a) Figure 1. Cross-section SEMs of imprinted features of linewidths a) 50 nm, b) 40 nm, and c) 30 nm, also demonstrating square feature profiles. From Resnick (2002). A separate imprint experiment yielded features as small as 20 nm, as shown in Figure 2.
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e) Figure 2. Top-down SEMs of imprinted line/space arrays of linewidth a) 100 nm, b) 80 nm, c) 60 nm, d) 40 nm, e) 30 nm, and f) 20 nm, and isolated lines of width g) 30 nm and h) 20 nm. From Resnick (2002). | ||||||||||
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