Support

• Funding for this work has been provided by:

- Semiconductor Research Corporation
- DARPA
- International SEMATECH
- Eastman Kodak Corporation

• PROLITH® software was donated by KLA-Tencor.
  

• Materials donations have been provided by:

- Sachem
- ChemFirst
- ShinEtsu MicroSi
- Midori Kagaku

• Computers have been donated by Intel Corporation.
  

• Software has been donated by Microsoft.