Publications and Conference Papers |
| M.D. Stewart, G.M. Schmid, S.V. Postnikov, C.G. Willson “Mechanistic understanding of line end shortening” Advances in Resist Technology, Proc. SPIE. (In press) |
| S.D. Burns, M.D. Stewart, J.N. Hilfiker, R.A. Synowicki, G.M. Schmid, C. Brodsky, C.G. Willson“Determining free volume changes during the PEB and PAB of a chemically amplified resist” 12th International Conference on Photopolymers, Oct. 16 2000. |
| M. D. Stewart, M. H. Somervell, H. V. Tran, S. V. Postnikov, C. G. Willson “Study of acid transport using IR spectroscopy and SEM” Proc. SPIE, 3999 665-674 (2000) |
| M. D. Stewart, S.V. Postnikov, H.V. Tran, D. R. Medeiros, M. A. Nierode, T. Cao, J. Byers, S. E. Webber, C. G. Willson;“Measurement of acid diffusion in thin polymer films above and below Tg” ACS Polymeric Mat. Sci. Eng., 81 58 (1999) |
| S. V. Postnikov, M. D. Stewart, H.V. Tran, M. A. Nierode, D. R. Medeiros, T. Cao, J. Byers, S. E. Webber, C. G. Willson;“A Study of Resolution Limits Due to Intrinsic Bias in Chemically Amplified Photoresists” J. Vac. Sci. Technol. B., 17(6) 3335 (1999) |