Top Surface Imaging

1.  "Background on Thin Layer imaging," (Excerpts from PhD Thesis of Mark Somervell)

2. "Top Surface Imaging at 157nm," Andrew Jamieson, Mark H. Somervell, Hoang Vi Tran, Raymond Hung, Scott A MacDonald, C. Grant Willson

Proceedings of the SPIE , vol. 4345 – In Press.  (Conference held in Santa Clara, CA.  2/2001)

3. "A Study of the Fundamental Contributions to Line Edge Roughness in a 193 nm, Top Surface Imaging System,"  Journal of Vacuum Science and Technology, Mark H. Somervell , David S. Fryer , Brian Osborn , Kyle Patterson  Jeffrey Byers, C. Grant Willson

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