Simulated Aerial Images from Alta 3500	Simulated CD (nm)
Alta3500 400.img	400
Alta3500 500.img	500
Alta3500 1000.img	1000

Hoya Substrate Optical Properties
l (nm)	n	k
257	2.0987	0.6460
365	1.6325	0.2832

Optical Properties of Photoresist's at i-line
Resist	A (1/mm)	B (1/mm)	C (cm2/mJ)	nune	nexp
IP3600	0.8607	0.1074	010142	1.6947	1.6887
PF88A5	0.7044	0.0400	0.0105	1.7006	1.6863

PFI 88A dissolution properties
Notch Model Fit
Developer	0.23N	0.26N
Rmax (nm/sec)	48	88
Rmin (nm/sec)	0.001	0.002
Mthnotch	0.411	0.503
n	3.39	3.36
n_notch	58.82	31.44

iP 3600 dissolution properties
Advanced Mack  Model Fit
Developer	0.26N	0.23N	0.2N
Rmax (nm/sec)	253	120	45
Rmin (nm/sec)	0.008	0.001	0.001
Rresin (nm/sec)	14.3	5	5
n	3.6783	4.1664	5.6734
l	13.8612	10.5352	7.1904