Useful Resources
- Exam 1 Key
- Exam 2 Key
- History of Chemical Amplification
- Photoresist materials: A historical perspective
Microlithography reference books
Microlithography: Science and Technology, Second Edition (Optical Science and Engineering)(Smith, Suzuki) [ISBN: 978-0824790240]
Chemistry and Lithography
(Okoroanyanwu) [ISBN: 978-1-118-03002-8]
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) (Levinson) [ISBN: 9780819483249]
Introduction to Microlithography: Second edition
(Bowden, Willson, Thompson) [ISBN: 9780841228481]
Diazonaphthoquinone-based Resists
(Dammel) [ISBN: 9780819410191]
Web links
Brief Look at Frauenhofer Diffraction Frauenhofer DiffractionChris Mack's online microelectronics course
Mathematica single-slit diffraction simulation
Mathematica single-slit diffraction pattern with Cornu spiral simulation
To view the Mathematica simulations, download the CDF player found on the linked webpages. **Warning! The CDF file is ~ 1 GB. The download may take a while on slower connections**
Video about first transistor. link
Video about Bakelite synthesis. link