Publications |
| 1. "Background on Thin Layer imaging," (Excerpts from PhD Thesis of Mark Somervell) |
| 2. "Top Surface Imaging at 157nm," Andrew Jamieson, Mark H. Somervell, Hoang Vi Tran, Raymond Hung, Scott A MacDonald, C. Grant Willson; Proceedings of the SPIE , vol. 4345 – In Press. (Conference held in Santa Clara, CA. 2/2001) |
| 3 "A Study of the Fundamental Contributions to Line Edge Roughness in a 193 nm, Top Surface Imaging System," Journal of Vacuum Science and Technology, Mark H. Somervell , David S. Fryer , Brian Osborn , Kyle Patterson Jeffrey Byers, C. Grant Willson |