Nanostructured Polymers Designed for Plasma/Energetic Beam Templating of Materials

Background

Many attempts have been made over the past 25 years to provide lithographers and researchers with tools and equations that can adequately predict relative etch rates of many different substrates. The most famous of these equations was presented by Gokan and Ohnishi in 1983. There equation attempted to correlate monomer content of carbon, hydrogen, and etc. to observed etch rates, and to be able to predict unstudied systems. Their system, just as others, has become outdated and ineffective in today’s actively changing labs.

Current Work

Our group focuses on the synthesis of novel monomers and polymers whose etch rates are studied by our colleagues at The Universities of Maryland and California.  Our novel polymers are designed to match current etch rate parameters of similar styrene based polymers. We hope that the synthesis of new monomers and polymers as well as existing ones can lead to a greater understanding of etch parameters today.

References

1. Gokan, H.; Esho, S.; Ohnishi, Y., Journal of the Electrochemical Society, 1983, 130, 143
2. Allen, R.; Wallraff, G.; Di Pietro, R.; Hofer, D.; Kunz, R., Journal of Photopolymer Science and Technology, 1994, 7, 507.
3. Allen, R.; Wan, I.; Wallraff, G.; Di Pietro, R.; Hofer, D.; Kunz, R., Journal of Photopolymer Science and Technology, 1995, 8, 623.
4. Varanasi, P.; Maniscalco J.; Mewherterm A.M.; Lawson, M.C.; Jordhamo G.; Allen, R.; Opitz, J.; Ito, H.; Wallow, T.; Hofer, D.; Lansdorf, L.; Jayaraman, S.; Vicari, R., SPIE, 1999, 3678, 51.
5. Wallow, T.; Brock, P.; Di Pietro, R.; Allen, R.; Opitz, J.;Sooriyakumaran, R.; Hofer, D.; Meute, J.; Byers, J.; Rich, G.; McCallum, M.; Schuetze, S.; Jayaraman, S.; Hullihen, K.; Vicari, R.; Rhodes, L.; Goodall, B.; Schick, R., SPIE, 1998, 3333, 92.
6. Wallow, T.; Brock, P.; Di Pietro, R.; Allen, R.; Opitz, J.;Sooriyakumaran, R.; Hofer, D.; Mewherter, A.M.; Cui, Y.; Yan, W.; Worth, G.; Moreau, W.; Meute, J.; Byers, J.; Rich, G.K.; McCallum, M.; Jayaraman, S.; Vicari, R.; Cagle, J.; Sun, S.; Hullihen, K., SPIE, 1999, 3678, 26.

Version History

Original page created 02/27/06