Publications and Conference Papers



M.D. Stewart, G.M. Schmid, S.V. Postnikov, C.G. Willson “Mechanistic understanding of line end shortening” Advances in Resist Technology, Proc. SPIE. (In press)
S.D. Burns, M.D. Stewart, J.N. Hilfiker, R.A. Synowicki, G.M. Schmid, C. Brodsky, C.G. Willson“Determining free volume changes during the PEB and PAB of a chemically amplified resist” 12th International Conference on Photopolymers, Oct. 16 2000.
M. D. Stewart, M. H. Somervell, H. V. Tran, S. V. Postnikov, C. G. Willson “Study of acid transport using IR spectroscopy and SEM” Proc. SPIE, 3999 665-674 (2000)
M. D. Stewart, S.V. Postnikov, H.V. Tran, D. R. Medeiros, M. A. Nierode, T. Cao, J. Byers, S. E. Webber, C. G. Willson;“Measurement of acid diffusion in thin polymer films above and below Tg” ACS Polymeric Mat. Sci. Eng., 81 58 (1999)
S. V. Postnikov, M. D. Stewart, H.V. Tran, M. A. Nierode, D. R. Medeiros, T. Cao, J. Byers, S. E. Webber, C. G. Willson;“A Study of Resolution Limits Due to Intrinsic Bias in Chemically Amplified Photoresists” J. Vac. Sci. Technol. B., 17(6) 3335 (1999)